Wide Pressure Range
Core Sensors offers pressure transducers capable of measuring from vacuum to 45,000 PSI, providing extensive coverage for various semiconductor manufacturing processes
Core Sensors is a leading manufacturer of pressure transducers specifically designed for semiconductor manufacturing applications including gas cabinets, gas mixing systems, wafer handling, and high-temperature processing. As the semiconductor industry shifts to support the next generation of wafers and chips using high-temperature gases, our pressure sensors are designed to operate and accurately measure. Our innovative approach utilizes bulk silicon MEMS technology combined with Hastelloy C276 nickel alloy to create pressure sensors with exceptional liquid and gas compatibility in high temperature and hazardous environments. We offer specialty services for ultra high purity applications, where the process connection requires special finishes as well as cleaning.
Featured Material: Hastelloy C276 Pressure Transducers
Hastelloy C276 is a nickel-chromium-molybdenum alloy known for its outstanding corrosion resistance and versatility in various chemical environments common to semiconductor and vapor deposition processing equipment. Core Sensors leverages this material’s properties to manufacture pressure transducers that excel in the demanding conditions of semiconductor processing. Core Sensors combines Hastelloy C276 with its bulk silicon MEMS technology to create pressure sensors and transducers with:
Liquid & Gas Compatibility: Designed to withstand various liquids and gases used in semiconductor processing.
Thick Diaphragm: Our single-piece construction design features no welds, silicone oil, or O-rings, eliminating contamination risk. Contact our factory regarding fittings such as 1/4″ VCR and material finish options.
High Accuracy: Accurate, repeatable pressure sensors with calibration data on request to further increase performance
Excellent Stability: Offering stability of ≤±0.25% of Full Scale over one year.
Durability: Capable of withstanding over 100 million pressure cycles in some models.
Core Sensors’ Hastelloy C276 pressure transducers represent a significant advancement in pressure measurement technology for the semiconductor industry. By combining the corrosion resistance of Hastelloy C276 with the precision of bulk silicon MEMS technology, these sensors provide reliable and accurate pressure monitoring across a wide range of semiconductor manufacturing processes.
Material Features
Cross section of bulk silicon MEMS sensor technology – no welds, no O-ring, no fluid filled cavities keeping your liquid or gas contained
Recommended Products for Semiconductor Manufacturing
Features include:
- ≤ ± 0.25% BFSL accuracy
- Operating temperature greater than 200°C; contact us for custom solutions at higher temperatures
- Configurable pressure ranges from 15 to 30,000 PSI sealed gauge (bar equivalent pressures available)
- Compensated over pressure and temperature with available calibration or polynomial data
- High strength Hastelloy or Inconel 718 sensing element
- Optional VCR fitting for ultra-high purity applications
- Extremely compact design
- More output signal and output signal options than traditional high temperature pressure sensors
- PT1000 RTD temperature output
Features include:
- Pressures from vacuum up to 45,000 PSI (3000 bar)
- Highly configurable design
- 1/4″ VCR process connection available for ultra-high purity; contact for finish details
- Optional integral snubber; temperature output on the CS10T Pressure Temperature Transducer
- Reverse polarity and EMI protection
- Oxygen cleaning available
Features include:
- Customized pressure ports for optimal flow and minimized volume
- Customized mounting features and housing shapes to customer requirements
- Special analog and digital signal conditioning
- Various material options for optimal compatibility
Connect With Our Sales Team
Let us know your semiconductor pressure transducer requirements.
Have questions? Need a quote? We are ready to help! Fill out the form and a member of our sales team will contact you to discuss your requirements. You can also give us a call at (862) 245-2673.
